China best Xd-100c 2.2kw 100m3/H Chamber Packaging Machines Rotary Vane Vacuum Pump manufacturer

Product Description

Product Description

Rotary vane vacuum pump mainly consists of pump body, rotor, rotary vane, end cap, oil tank and so on. A rotor with 3 vanes is mounted eccentrically in a cylindrical housing, the 3 vanes slide in the rotor slots. When rotating, the centrifugal force keeps the vanes in contact with the housing and the rotation drives the rotor to slide along the housing.

1.Exhaust porti nterface 2.Exhaust filter 3.Suction valve
4.Oil level gauge 5.Drain valve  6.Filler plug
7.Exhaust valve 8.Blade 9.Rotor
10.Tank 11.Axial fan 12.Motor 
13.Oil filter 14.Suction port interface 15.Air ballast valve
16.Radiator tube 17.Return valve  

Working principle

The diagram below shows the structure of the pump. When the rotor rotates, the vanes, the housing and the 2 end caps form three chambers, every turn, the volume of each chamber increases or decreases due to the sliding of the vanes, completing the suction and discharge process.

Main features

  1. Able to work continuously for a long time under the inlet pressure of 5×104Pa.
  2.  Low noise, low vibration, foot bolts is not required.
  3. Exhaust filter in the pump effectively separates the oil in the gas to avoid pollution of the environment.
  4. Directly driven by motor.
  5. Compact structure, light weight, air-cooled.
  6. Easy to operate, install and maintain.


The rotary vane vacuum pump is suitable for the applications where the requirement of vacuum is not high and the operation is reliable and maintenance is convenient. It is commonly used in vacuum packaging of various foodstuffs, vacuum forming of rubber and plastic industry, paper transmission of printing industry, vacuum impregnation and leakage prevention of various castings, vacuum fixture, vacuum drying, vacuum filtration, and hospital surgery.

Product Parameters


Model Nominal pumping speed(50Hz)
Ultimate pressure
Ultimate pressure with Gas Ballast valve on ≤Pa Nominal motor rating (50Hz)   kw         Nominal motor speed  (50Hz) RPM  Water vapour capacity
Noise level   db(A) Oil capacity
Working Temperature
Suction Connection size
Discharge Connection size
XD-571 10 200   0.37 2800 0.4 62 0.5 77 G1/2″ G1/2″ 16
XD-571 20 200   0.75 2880 0.4 63 0.5 77 G1/2″ G1/2″ 18
XD-571A 20 200   0.75 2880 0.4 63 0.5 77 G1/2″ G1/2″ 18
XD-571C 20 200   0.9 2880 0.4 65 0.5 79 G3/4″ G3/4″ 20
XD-571 25 200   0.75 2880 0.4 65 0.5 79 G3/4″ G3/4″ 20
XD-040C 40 50 200 1.1 1500 0.6 64 1.25 76 G1 1/4″ G1 1/4″ 48
XD-063C 63 50 200 1.5/2.2 1500 1 65 2 79 G1 1/4″ G1 1/4″ 58
XD-063D 63 50 200 1.5 1500 0.6 65 1.5 79 G1 1/4″ G1 1/4″ 49
XD-100C 100 50 200 2.2/3 1500 1.5 66 2 79 G1 1/4″ G1 1/4″ 72
XD-160C 160 50 200 4 1500 2.5 71 5 70 G2″ G2″ 158
XD-202C 200 50 200 4 1500 4 73 5 70 G2″ G2″ 158
XD-250C 250 50 200 5.5 1500 4.5 73 7 73 G2″ G2″ 195
XD-302C 300 50 200 5.5/7.5 1500 5 75 7 75 G2″ G2″ 211

Dimensional drawing



Our factory



Q: What information should I offer for an inquiry?
A: You can inquire based on the model directly, but it is always recommended that you contact us so that we can help you to check if the pump is the most appropriate for your application.

Q: Can you make a customized vacuum pump?
A: Yes, we can do some special designs to meet customer applications. Such as customized sealing systems, speical surface treatment can be applied for roots vacuum pump and screw vacuum pump. Please contact us if you have special requirements. 

Q: I have problems with our vacuum pumps or vacuum systems, can you offer some help?
A: We have application and design engineers with more than 30 years of experience in vacuum applications in different industries and help a lot of customers resolve their problems, such as leakage issues, energy-saving solutions, more environment-friendly vacuum systems, etc. Please contact us and we’ll be very happy if we can offer any help to your vacuum system.

Q: Can you design and make customized vacuum systems?
A: Yes, we are good for this.

Q: What is your MOQ?
A: 1 piece or 1 set.

Q: How about your delivery time?
A: 5-10 working days for the standard vacuum pump if the quantity is below 20 pieces, 20-30 working days for the conventional vacuum system with less than 5 sets. For more quantity or special requirements, please contact us to check the lead time.

Q: What are your payment terms?
A: By T/T, 50% advance payment/deposit and 50% paid before shipment.

Q: How about the warranty?
A: We offer 1-year warranty (except for the wearing parts).

Q: How about the service?
A: We offer remote video technical support. We can send the service engineer to the site for some special requirements.

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After-sales Service: Online Video Instruction
Warranty: 1 Year
Oil or Not: Oil

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Shipping Cost:

Estimated freight per unit.

about shipping cost and estimated delivery time.
Payment Method:


Initial Payment

Full Payment
Currency: US$
Return&refunds: You can apply for a refund up to 30 days after receipt of the products.

vacuum pump

What Is the Role of Vacuum Pumps in Semiconductor Manufacturing?

Vacuum pumps play a critical role in semiconductor manufacturing processes. Here’s a detailed explanation:

Semiconductor manufacturing involves the production of integrated circuits (ICs) and other semiconductor devices used in various electronic applications. Vacuum pumps are used extensively throughout the semiconductor manufacturing process to create and maintain the required vacuum conditions for specific manufacturing steps.

Here are some key roles of vacuum pumps in semiconductor manufacturing:

1. Deposition Processes: Vacuum pumps are used in deposition processes such as physical vapor deposition (PVD) and chemical vapor deposition (CVD). These processes involve depositing thin films of materials onto semiconductor wafers to create various layers and patterns. Vacuum pumps help create a low-pressure environment necessary for precise control of the deposition process, ensuring uniform and high-quality film formation.

2. Etching and Cleaning: Vacuum pumps are utilized in etching and cleaning processes, which involve the removal of specific layers or contaminants from semiconductor wafers. Dry etching techniques, such as plasma etching and reactive ion etching, require a vacuum environment to facilitate the ionization and removal of material. Vacuum pumps aid in creating the necessary low-pressure conditions for efficient etching and cleaning processes.

3. Ion Implantation: Ion implantation is a process used to introduce impurities into specific regions of a semiconductor wafer to modify its electrical properties. Vacuum pumps are used to evacuate the ion implantation chamber, creating the required vacuum environment for accurate and controlled ion beam acceleration and implantation.

4. Wafer Handling and Transfer: Vacuum pumps are employed in wafer handling and transfer systems. These systems utilize vacuum suction to securely hold and manipulate semiconductor wafers during various manufacturing steps, such as loading and unloading from process chambers, robotic transfer between tools, and wafer alignment.

5. Load Lock Systems: Load lock systems are used to transfer semiconductor wafers between atmospheric conditions and the vacuum environment of process chambers. Vacuum pumps are integral components of load lock systems, creating and maintaining the vacuum conditions necessary for wafer transfer while minimizing contamination risks.

6. Metrology and Inspection: Vacuum pumps are utilized in metrology and inspection tools used for characterizing semiconductor devices. These tools, such as scanning electron microscopes (SEMs) and focused ion beam (FIB) systems, often operate in a vacuum environment to enable high-resolution imaging and accurate analysis of semiconductor structures and defects.

7. Leak Detection: Vacuum pumps are employed in leak detection systems to identify and locate leaks in vacuum chambers, process lines, and other components. These systems rely on vacuum pumps to evacuate the system and then monitor for any pressure rise, indicating the presence of leaks.

8. Cleanroom Environment Control: Semiconductor manufacturing facilities maintain cleanroom environments to prevent contamination during the fabrication process. Vacuum pumps are used in the design and operation of the cleanroom ventilation and filtration systems, helping to maintain the required air cleanliness levels by removing particulates and maintaining controlled air pressure differentials.

Vacuum pumps used in semiconductor manufacturing processes are often specialized to meet the stringent requirements of the industry. They need to provide high vacuum levels, precise control, low contamination levels, and reliability for continuous operation.

Overall, vacuum pumps are indispensable in semiconductor manufacturing, enabling the creation of the necessary vacuum conditions for various processes, ensuring the production of high-quality semiconductor devices.

vacuum pump

Can Vacuum Pumps Be Used for Soil and Groundwater Remediation?

Vacuum pumps are indeed widely used for soil and groundwater remediation. Here’s a detailed explanation:

Soil and groundwater remediation refers to the process of removing contaminants from the soil and groundwater to restore environmental quality and protect human health. Vacuum pumps play a crucial role in various remediation techniques by facilitating the extraction and treatment of contaminated media. Some of the common applications of vacuum pumps in soil and groundwater remediation include:

1. Soil Vapor Extraction (SVE): Soil vapor extraction is a widely used remediation technique for volatile contaminants present in the subsurface. It involves the extraction of vapors from the soil by applying a vacuum to the subsurface through wells or trenches. Vacuum pumps create a pressure gradient that induces the movement of vapors towards the extraction points. The extracted vapors are then treated to remove or destroy the contaminants. Vacuum pumps play a vital role in SVE by maintaining the necessary negative pressure to enhance the volatilization and extraction of contaminants from the soil.

2. Dual-Phase Extraction (DPE): Dual-phase extraction is a remediation method used for the simultaneous extraction of both liquids (such as groundwater) and vapors (such as volatile organic compounds) from the subsurface. Vacuum pumps are utilized to create a vacuum in extraction wells or points, drawing out both the liquid and vapor phases. The extracted groundwater and vapors are then separated and treated accordingly. Vacuum pumps are essential in DPE systems for efficient and controlled extraction of both liquid and vapor-phase contaminants.

3. Groundwater Pumping and Treatment: Vacuum pumps are also employed in groundwater remediation through the process of pumping and treatment. They are used to extract contaminated groundwater from wells or recovery trenches. By creating a vacuum or negative pressure, vacuum pumps facilitate the flow of groundwater towards the extraction points. The extracted groundwater is then treated to remove or neutralize the contaminants before being discharged or re-injected into the ground. Vacuum pumps play a critical role in maintaining the required flow rates and hydraulic gradients for effective groundwater extraction and treatment.

4. Air Sparging: Air sparging is a remediation technique used to treat groundwater and soil contaminated with volatile organic compounds (VOCs). It involves the injection of air or oxygen into the subsurface to enhance the volatilization of contaminants. Vacuum pumps are utilized in air sparging systems to create a vacuum or negative pressure zone in wells or points surrounding the contaminated area. This induces the movement of air and oxygen through the soil, facilitating the release and volatilization of VOCs. Vacuum pumps are essential in air sparging by maintaining the necessary negative pressure gradient for effective contaminant removal.

5. Vacuum-Enhanced Recovery: Vacuum-enhanced recovery, also known as vacuum-enhanced extraction, is a remediation technique used to recover non-aqueous phase liquids (NAPLs) or dense non-aqueous phase liquids (DNAPLs) from the subsurface. Vacuum pumps are employed to create a vacuum or negative pressure gradient in recovery wells or trenches. This encourages the movement and extraction of NAPLs or DNAPLs towards the recovery points. Vacuum pumps facilitate the efficient recovery of these dense contaminants, which may not be easily recoverable using traditional pumping methods.

It’s important to note that different types of vacuum pumps, such as rotary vane pumps, liquid ring pumps, or air-cooled pumps, may be used in soil and groundwater remediation depending on the specific requirements of the remediation technique and the nature of the contaminants.

In summary, vacuum pumps play a vital role in various soil and groundwater remediation techniques, including soil vapor extraction, dual-phase extraction, groundwater pumping and treatment, air sparging, and vacuum-enhanced recovery. By creating and maintaining the necessary pressure differentials, vacuum pumps enable the efficient extraction, treatment, and removal of contaminants, contributing to the restoration of soil and groundwater quality.

vacuum pump

What Is a Vacuum Pump, and How Does It Work?

A vacuum pump is a mechanical device used to create and maintain a vacuum or low-pressure environment within a closed system. Here’s a detailed explanation:

A vacuum pump operates on the principle of removing gas molecules from a sealed chamber, reducing the pressure inside the chamber to create a vacuum. The pump accomplishes this through various mechanisms and techniques, depending on the specific type of vacuum pump. Here are the basic steps involved in the operation of a vacuum pump:

1. Sealed Chamber:

The vacuum pump is connected to a sealed chamber or system from which air or gas molecules need to be evacuated. The chamber can be a container, a pipeline, or any other enclosed space.

2. Inlet and Outlet:

The vacuum pump has an inlet and an outlet. The inlet is connected to the sealed chamber, while the outlet may be vented to the atmosphere or connected to a collection system to capture or release the evacuated gas.

3. Mechanical Action:

The vacuum pump creates a mechanical action that removes gas molecules from the chamber. Different types of vacuum pumps use various mechanisms for this purpose:

– Positive Displacement Pumps: These pumps physically trap gas molecules and remove them from the chamber. Examples include rotary vane pumps, piston pumps, and diaphragm pumps.

– Momentum Transfer Pumps: These pumps use high-speed jets or rotating blades to transfer momentum to gas molecules, pushing them out of the chamber. Examples include turbomolecular pumps and diffusion pumps.

– Entrapment Pumps: These pumps capture gas molecules by adsorbing or condensing them on surfaces or in materials within the pump. Cryogenic pumps and ion pumps are examples of entrainment pumps.

4. Gas Evacuation:

As the vacuum pump operates, it creates a pressure differential between the chamber and the pump. This pressure differential causes gas molecules to move from the chamber to the pump’s inlet.

5. Exhaust or Collection:

Once the gas molecules are removed from the chamber, they are either exhausted into the atmosphere or collected and processed further, depending on the specific application.

6. Pressure Control:

Vacuum pumps often incorporate pressure control mechanisms to maintain the desired level of vacuum within the chamber. These mechanisms can include valves, regulators, or feedback systems that adjust the pump’s operation to achieve the desired pressure range.

7. Monitoring and Safety:

Vacuum pump systems may include sensors, gauges, or indicators to monitor the pressure levels, temperature, or other parameters. Safety features such as pressure relief valves or interlocks may also be included to protect the system and operators from overpressure or other hazardous conditions.

It’s important to note that different types of vacuum pumps have varying levels of vacuum they can achieve and are suitable for different pressure ranges and applications. The choice of vacuum pump depends on factors such as the required vacuum level, gas composition, pumping speed, and the specific application’s requirements.

In summary, a vacuum pump is a device that removes gas molecules from a sealed chamber, creating a vacuum or low-pressure environment. The pump accomplishes this through mechanical actions, such as positive displacement, momentum transfer, or entrapment. By creating a pressure differential, the pump evacuates gas from the chamber, and the gas is either exhausted or collected. Vacuum pumps play a crucial role in various industries, including manufacturing, research, and scientific applications.

China best Xd-100c 2.2kw 100m3/H Chamber Packaging Machines Rotary Vane Vacuum Pump   manufacturer China best Xd-100c 2.2kw 100m3/H Chamber Packaging Machines Rotary Vane Vacuum Pump   manufacturer
editor by Dream 2024-05-17

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